Prototyping of a highly performant and integrated piezoresistive force sensor for microscale applications
نویسندگان
چکیده
منابع مشابه
Prototyping of a highly performant and integrated piezoresistive force sensor for microscale applications
In this paper, the prototyping of a new piezoresistive microforce sensor is presented. An original design taking advantage on both mechanical and bulk piezoresistive properties of silicon is presented and enables to easily fabricate a very small, large range, high sensitivity with high integration potential sensor. The sensor is made of two silicon strain gages for which widespread and known mi...
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2014
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/24/3/035018